Short pulse thermal laser microforming technique

Griffiths, Jonathan David, Edwardson, Stuart, Dearden, Geoff and Watkins, Ken (2011) Short pulse thermal laser microforming technique. In: IWOTE'11 International Workshop on Thermal Forming and Welding Distortion, 6th-7th April 2011, Bremen, DE.

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Item Type:Conference or Workshop contribution (Paper)
Item Status:Live Archive


MEMS manufacturing requires accurate positioning and high reproducibility. Lasers can be utilised in accurate post-fabrication adjustment, allowing for manufacturing processes with relatively large tolerances. Laser micro forming (LμF) is a process for the precision adjustment, shaping or correction of distortion in micro-scale metallic components through the application of laser irradiation without the need for permanent dies or tools. The non-contact nature of the process is also useful in accessing specific micro-components within a device which may be highly sensitive to mechanical force. As such it has potential for widespread application in both the manufacturing and microelectronics industry. A novel technique for thermal LμF involving picosecond duration pulses has been documented and its potential application in the micro adjustment of MEMS scale materials discussed.

Keywords:Laser, MEMS
Subjects:H Engineering > H300 Mechanical Engineering
Divisions:College of Science > School of Engineering
ID Code:14883
Deposited On:11 Sep 2014 18:35

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