Abstract

MEMS manufacturing requires accurate positioning and high reproducibility. Lasers can be utilised in accurate post-fabrication adjustment, allowing for manufacturing processes with relatively large tolerances. Laser micro forming (LμF) is a process for the precision adjustment, shaping or correction of distortion in micro-scale metallic components through the application of laser irradiation without the need for permanent dies or tools. The non-contact nature of the process is also useful in accessing specific micro-components within a device which may be highly sensitive to mechanical force. As such it has potential for widespread application in both the manufacturing and microelectronics industry. Presented in this work is a novel technique for thermal LμF involving picosecond duration pulses. A potential application in the micro-adjustment of MEMS scale components is also presented.