Laser micro adjustment using ultra short pulses

Griffiths, Jonathan David, Edwardson, Stuart, Dearden, Geoff and Watkins, Ken (2011) Laser micro adjustment using ultra short pulses. In: ICALEO 2011, 23rd - 27th October 2011, Orlando, FL, USA.

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Item Type:Conference or Workshop contribution (Paper)
Item Status:Live Archive


MEMS manufacturing requires accurate positioning and high reproducibility. Lasers can be utilised in accurate post-fabrication adjustment, allowing for manufacturing processes with relatively large tolerances. Laser micro forming (LμF) is a process for the precision adjustment, shaping or correction of distortion in micro-scale metallic components through the application of laser irradiation without the need for permanent dies or tools. The non-contact nature of the process is also useful in accessing specific micro-components within a device which may be highly sensitive to mechanical force. As such it has potential for widespread application in both the manufacturing and microelectronics industry. Presented in this work is a novel technique for thermal LμF involving picosecond duration pulses. A potential application in the micro-adjustment of MEMS scale components is also presented.

Subjects:H Engineering > H300 Mechanical Engineering
Divisions:College of Science > School of Engineering
ID Code:14882
Deposited On:11 Sep 2014 18:23

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