Thermal laser micro-adjustment using ultra-short pulses

Griffiths, Jonathan David, Edwardson, Stuart, Dearden, Geoff and Watkins, Ken (2012) Thermal laser micro-adjustment using ultra-short pulses. In: 37th international MATADOR conference, 25th-27th July 2012, Manchester, UK.

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Item Type:Conference or Workshop contribution (Paper)
Item Status:Live Archive


MEMS manufacturing requires accurate positioning and high reproducibility. Lasers can be utilised in accurate post-fabrication adjustment, allowing for manufacturing processes with relatively large tolerances. Laser micro forming (LμF) is a process for the precision adjustment, shaping or correction of distortion in micro-scale metallic components through the application of laser irradiation without the need for permanent dies or tools. The non-contact nature of the process is also useful in accessing specific micro-components within a device which may be highly sensitive to mechanical force. As such it has potential for widespread application in both the manufacturing and microelectronics industry.
In this work, the micro-adjustment of 1000 x 300 μm stainless steel actuator arms using a mode locked fibre laser with a maximum pulse energy and duration of 3 μJ and 20 ps respectively was conducted. The effect of pulse overlap, laser power, irradiation strategy and number of irradiations on the net bend angle is presented. In addition, the mechanism of thermal deformation was investigated through numerical modeling and the potential for its application in the micro-adjustment of MEMS scale components discussed.

Keywords:Micro-adjustment, Laser Forming, Temperature Gradient Mechanism (TGM), MEMS, FEM
Subjects:H Engineering > H300 Mechanical Engineering
Divisions:College of Science > School of Engineering
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ID Code:14879
Deposited On:10 Sep 2014 17:22

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