Tormen, Massimo and Carpentiero, Alessandro and Ferrari, Enrico and Cojoc, Dan and Di Fabrizio, Enzo (2007) Novel fabrication method for three-dimensional nanostructuring: an application to micro-optics. Nanotechnology, 18 (38). p. 385301. ISSN 0957-4484
Full text not available from this repository.Abstract
We propose a 3D micro and nanofabrication method with potential applications to several nanotechnology-related fields. Our approach is based on the combination of lithographic steps and isotropic wet etchings performed on a quartz or glass substrate to form 3D structures with very accurate shape control and nanometer scale surface roughness. The resulting concavities at the quartz surface are converted into convex plastic elements by hot embossing or casting techniques. Complex all-polymer refractive optical elements have been realized by this method. Upon illumination, such micro-optics focus the light into predetermined 3D distributions of focal lines and spots. The general fabrication scheme explored here is illustrated through a series of examples in optics, but is expected to offer new solutions to other fields such as medicine, microfluidics and nano-optics.
| Item Type: | Article |
|---|---|
| Additional Information: | We propose a 3D micro and nanofabrication method with potential applications to several nanotechnology-related fields. Our approach is based on the combination of lithographic steps and isotropic wet etchings performed on a quartz or glass substrate to form 3D structures with very accurate shape control and nanometer scale surface roughness. The resulting concavities at the quartz surface are converted into convex plastic elements by hot embossing or casting techniques. Complex all-polymer refractive optical elements have been realized by this method. Upon illumination, such micro-optics focus the light into predetermined 3D distributions of focal lines and spots. The general fabrication scheme explored here is illustrated through a series of examples in optics, but is expected to offer new solutions to other fields such as medicine, microfluidics and nano-optics. |
| Keywords: | Nanolitography, micro-optics |
| Subjects: | F Physical Sciences > F310 Applied Physics J Technologies > J522 Photo-Lithography |
| Divisions: | College of Sciences > Faculty of Science > School of Life Sciences |
| Depositing User: | Enrico Ferrari |
| Date Deposited: | 27 Nov 2012 23:16 |
| Last Modified: | 27 Nov 2012 23:16 |
| URI: | http://eprints.lincoln.ac.uk/id/eprint/6981 |
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