Novel fabrication method for three-dimensional nanostructuring: an application to micro-optics

Tormen, Massimo and Carpentiero, Alessandro and Ferrari, Enrico and Cojoc, Dan and Di Fabrizio, Enzo (2007) Novel fabrication method for three-dimensional nanostructuring: an application to micro-optics. Nanotechnology, 18 (38). p. 385301. ISSN 0957-4484

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Official URL: http://dx.doi.org/10.1088/0957-4484/18/38/385301

Abstract

We propose a 3D micro and nanofabrication method with potential applications to several nanotechnology-related fields. Our approach is based on the combination of lithographic steps and isotropic wet etchings performed on a quartz or glass substrate to form 3D structures with very accurate shape control and nanometer scale surface roughness. The resulting concavities at the quartz surface are converted into convex plastic elements by hot embossing or casting techniques. Complex all-polymer refractive optical elements have been realized by this method. Upon illumination, such micro-optics focus the light into predetermined 3D distributions of focal lines and spots. The general fabrication scheme explored here is illustrated through a series of examples in optics, but is expected to offer new solutions to other fields such as medicine, microfluidics and nano-optics.

Item Type:Article
Additional Information:We propose a 3D micro and nanofabrication method with potential applications to several nanotechnology-related fields. Our approach is based on the combination of lithographic steps and isotropic wet etchings performed on a quartz or glass substrate to form 3D structures with very accurate shape control and nanometer scale surface roughness. The resulting concavities at the quartz surface are converted into convex plastic elements by hot embossing or casting techniques. Complex all-polymer refractive optical elements have been realized by this method. Upon illumination, such micro-optics focus the light into predetermined 3D distributions of focal lines and spots. The general fabrication scheme explored here is illustrated through a series of examples in optics, but is expected to offer new solutions to other fields such as medicine, microfluidics and nano-optics.
Keywords:Nanolitography, micro-optics
Subjects:F Physical Sciences > F310 Applied Physics
J Technologies > J522 Photo-Lithography
Divisions:College of Science > School of Life Sciences
ID Code:6981
Deposited By: Enrico Ferrari
Deposited On:27 Nov 2012 23:16
Last Modified:27 Nov 2012 23:16

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