Ablation: a broad term

Dowding, C. F. and Lawrence, Jonathan (2010) Ablation: a broad term. In: Laser materials processing technology: research and applications. Woodhead Publishing, Cambridge. ISBN 9781845694746, 1845694740

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Abstract

Ablation: A Broad Term

Item Type:Book Section
Additional Information:Ablation: A Broad Term
Keywords:KrF excimer laser, micromachining, debris control, flowing liquid immersion
Subjects:H Engineering > H680 Optoelectronic Engineering
H Engineering > H700 Production and Manufacturing Engineering
Divisions:College of Science > School of Engineering
ID Code:3176
Deposited By: Rosaline Smith
Deposited On:06 Aug 2010 07:39
Last Modified:18 Jul 2011 16:31

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